TECHNOLOGIES & APPLICATIONS
IMPLAMOD: A HIGH-VOLTAGE REPETITIVE PULSE GENERATOR
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The IMPLAMOD generator is a system recently developed at the Pulsed Power Department of IHCE. IMPLAMOD is designed to supply power for plasma immersion ion implantation equipment. It also can be used as an accelerating voltage power supply for charged particle beam sources. |
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Block diagram of the IMPLAMOD generator
Typical oscillogram of a voltage pulse produced by IMPLAMOD
Peak voltage: ~60 kV.
Load resistance: 1.5 kW.
| Peak voltage | Umax = 20 - 60 ê |
| Peak current | Imax = 40 À |
| Polarity and waveform | ¯|_|¯ |
| Duration | tp= 5 – 20 µs |
| Risetime | tr≤ 0,1tp |
| Falltime | tf≤ 0,2tp |
| Peak voltage stability | DUmax= ±0,1Umax |
| Pulse repetition rate | f = 10 – 1200 Ãö |
| Maximum load average power | Pmax = 10 êÂÀ |
| Control: : |
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Manual (from control board):
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| Computer control allows any combinations of tp and f within operating ranges | |||||||||||||||||||
| Power supply from | 3 x 380 ± 20 V, 50 Hz | ||||||||||||||||||
| Power input | 15 kW | ||||||||||||||||||
| Continuous operation | |||||||||||||||||||
| Air-water cooling | |||||||||||||||||||
| Water flow rate | 3 – 6 l/min | ||||||||||||||||||
| Generator components (see block diagram) | |||||||||||||||||||
| power supply integrated with control unit | (o.a.d.: 1,00x0,70x1,30 m) | ||||||||||||||||||
| modulator | (o.a.d.: 0,60x0,85x2,10 m) | ||||||||||||||||||
| pulse transformer | (o.a.d.: 0,63x0,77x1,50 m) | ||||||||||||||||||
For further information please contact:
Vadim A. Vizir
Ph.D. (Engineering), Leading Researcher
Phone: (3822) 49-26-73
Fax: (3822) 49-27-51
E-mail: kim@oit.hcei.tsc.ru
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