TECHNOLOGIES & APPLICATIONS

LINEAR MAGNETRONS WITH ROTATING CYLINDRICAL CATHODE

Linear magnetron sputtering systems (LMSS) with the rotating cylindrical cathodes developed at the Institute of High Current Electronics are intended for using in high throughoutput vacuum installations to deposit coatings of metals and their compounds on large-area substrates, in particular, on architectural glasses.

High cathode utilization degree (up to 80%) is the main advantage of the rotating magnetron. Depending on your installation construction and your requirements, we can offer either magnetrons with continuously rotating target or magnetron with periodically manually turned target. High stability in the processes of reactive sputtering is an additional advantage of the magnetrons with continuously rotating target.

Magnetrons with continuously rotating target are intended for using in conveyor type sputtering systems and in batch type sputtering system with unmoved sources.

Magnetrons with manually turned target are intended for using in a batch type sputtering systems with the movable sources.

Constructively, a LMSS presents a 80-120 - mm diameter and up to 2.5-m long tube made of sputtering metal. Inside the tube (sputtering cathode) there placed a magnetic system based on the permanent samarium-cobalt magnets and the channels for the cooling water running. Vacuum sealing system allows rotating the cathode relatively the magnets at that new cathode regions come to the sputtering zone.

Depending on your requirements, we can suggest you magnetrons with magnet system that forms either one sputtered particles flow or two flows in diametrically opposite directions. The second design allows depositing coating on two flat substrates simultaneously.

Magnet system design is based on the results of computer simulation and provides high homogeneity of coating deposition even at essential target erosion.

LMSS length as well as the cathode material is chosen by the consumer.

For further information please contact:

Nikolay F. Kovsharov
Head of Sector, Candidate of techn. sci.

Phone: (3822) 49-14-20

Nikolay S. Sochugov

Senior Research Scientist, Candidate of phys.-math.sci.

Phone: (3822) 49-16-51

E-mail: sochugov@lae.hcei.tsc.ru

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